This page covers excel sheets 11n data rate table, fixed wimax bandwidth table, mobile wimax bw with fs, 16e data rate calculator, evm conversions, pdf ppt files ofdm versus ofdma,osi,rrh,11a physical layer,router, beamforming and projects in matlab and simulink. Theyll give your presentations a professional, memorable appearance the kind of sophisticated look that todays audiences expect. The most popular rf mems device is the rf mems switch. Showdirector is another android application that enables controlling powerpoint slides over wifi or bluetooth. It is arguably a more powerful application that presenter.
Omrons mems switch has a spdtsingle pole double throw contact configuration. This novel structure is used to inductively tune the isolation in c, x and ku bands. This paper presents a novel design of a rf mems switch. This example describes an array of heating tubes submerged in a vessel with fluid flow entering at the bottom. Imc sweden, maluf and ti mems examples accelerometers sources.
It is the short form of micro electro mechanical systems. As an example, all the aforementioned commercial rfmems products use. Mems switches offer the high rf performance and low dc power consumption of electromechanical parts, and the small size, weight, and lowcost features of semiconductor parts. They are compact, light and less lossy with a high linearity up to high frequency. Ppt design, fabrication and characterisation of rfmems. History mems evolved from the integrated circuit industry. High added value applications for rfmems switchesvaricaps the use of mems switches in highend markets depend on 5 key parameters. Nguyen rf mems for wireless communications imems01 short course attaining highqproblem. Rf and microwave innovations and emerging technologies. A novel rf mems switch on frequency reconfigurable antenna. An early prototype simulation, of an oblique view in the onstate 4 techniques of the switch the rf mems device employs two singlepole doublethrow spdt switches, which are mounted at each end of a beam. Van caekenberge rf mems on the radar, ieee microwave magazine october 2009. A capacitive rf mems shunt switch shinji kobayashi, hiroshi kawai murata manufacturing co. To overcome this problem, a small size rf mems switch utilizing a moving plate with multiple holes supported by a low.
Rf mems technology rf mems refers to components for which moving submillimeter sized parts provide rf functionality. Mems are ic devices which will have both electrical as well as mechanical components. Highperformance and lowcost capacitive switches for rf. Rf mems switch performance and features such as actuation voltage. A dc voltage greater than the pullin voltage is applied across the switch, causing the bridge to collapse onto the dielectric layer with a resulting increase in the capacitance of the device. Introduction to rf mems switch working and its applications. Basic structure and isometric view of switch contact. The advantage of using a mems rf switch over solid state switches is their ability to switch high power levels with high linearity.
This is a multiphysics model because it involves fluid dynamics coupled with heat transfer. Design of low actuation voltage rf mems switch sergio p. Winner of the standing ovation award for best powerpoint templates from presentations magazine. High power amplifier design with rfmems output switch. An overview of rf mems switches capacitor switch scribd. This model analyzes an rf mems switch consisting of a thin micromechanical bridge suspended over a dielectric layer. This has advantages of high on state contact force and high off state isolation. Lets take a look at how you can use comsol multiphysics to simulate an rf mems switch. Functional diagrams of two common rf mems switch structures. Development of rf mems switches for high power applications. The general approach has been to develop base sensor technology. This paper presents the design, analysis, simulation of a novel radiofrequency micro electromechanical system rf mems switch on the frequency reconfigurable antenna application. A wide variety of mems devices is available, including sensors, actuators and switches. Two mems chips that have a spst single pole single throw contact configuration are installed on the ceramic package using the flip chip bonding method as shown fig.
Rf mems based switch matrices have several advantages compared to the mechanical or solidstate switch based ones for space applications. Jan 07, 2014 these devices can switch at rf frequencies and tend to have high isolation, i. The switch is a capacitive type, which is actuated by an electrostatic force. Over the last decade, a large number of papers have been published on the development of rf mems devices mainly focusing on the rf mems switches as a basic building block for more complex applications. An overview of rf mems switches free download as powerpoint presentation. Ppt mems optical switches powerpoint presentation free. Huikai xie most figures and data in this lecture, unless cited otherwise, were taken from rf mems theory, design and technology by g. One of the first examples developed in 1995 2,3 was an electrostatic actuated rf mems shunt switch see fig. High performance rf mems switches the previously established microgripper technology has been applied to realise an rf mems latching switch. Electric circuit symbols element set for powerpoint. Rf mems switches can be equipped with antenna design to make an antenna recon. Ultrasmall radio frequency and microwave microelectromechanical systems rf mems, such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. Mems switch is compared to previous research results as shown in fig. Howe 1 and others to describe an emerging research field, where mechanical elements, like cantilevers or membranes, had been manufactured at a scale more akin to microelectronic circuit than to lathe machining.
Despite the advantages in the design of rf mems switches designing a low actuation voltage rf mems switch is still a challenging task. An rfmems switch utilizes mechanical movement of switch beam to achieve a short or an open circuit in. Microelectromechanical systems mems technology is an evolving technology that allows device fabrication using components at a submillimeter scale 1 to 100 micrometers. Micro electro mechanical systems or mems is a term coined around 1989 by prof. Nguyen2 1radiation laboratory and 2center for microsystems department of electrical engineering and computer science university of michigan. Department of electronics and communication engineering, apex institute of engineering and technology, india. Design of rf mems based switch matrix for space applications. Sem image of ohmic switch by radant 8 electro statically actuated mems micro switch for. A novel micromechanical switcharchitecture based on an ultrareliable material set, incorporating new design and processing techniques 400v2a rf relay smart rfand powerrelay systems highpower, highreliability. Download ppt on micro electro mechanical system mems introduction. Rfmems switches can be equipped with antenna design to make an antenna recon. It promises better properties over the electromechanical and semiconductor switches. A free powerpoint ppt presentation displayed as a flash slide show on id.
Performance improvement of rfmems capacitive switch via. This paper emphasis on stateoftheart of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of rf mems switch devices. Oct 31, 20 this contribution presents an optimization strategy for the mechanical and geometrical characteristics of clampedclamped dielectricless rfmems switches in order to enhance their reliability performances both in terms of switch properties control and longterm actuation behavior. A complete platform for rf switch and varactor design. The picture contains only hotswitching mode experiments. The major part of this chapter is committed to the comparison of the rf mems switches with state of the art solid state. Download limit exceeded you have exceeded your daily download allowance. May 23, 2014 the rf mems switches are frequently used in microwave and radio frequency communication devices, such as transmitters and receivers, mode selection switch, antenna switch, etc. The beam is balanced on a central pivot to provide a seesaw mechanism. Radiofrequency microelectromechanical system wikipedia.
Pdf a comprehensive study on rf mems switch researchgate. Rf mems have in general seen a remarkable growth in the past two decades due to the immense potentials in defense and commercial applications. Spst, spdt or xpyt or be used in rf circuits phase shifters, filters, typical configuration. Nguyen2 1radiation laboratory and 2center for microsystems department of electrical engineering and computer science university of michigan ann arbor, michigan 481092122 usa abstract lowloss microwave microelectromechanical systems. The symbols in this design are made of simple yet highly defined powerpoint icons. In this thesis, a fully bicmos embedded rfmems switch for mmwave. The rf mems switches are frequently used in microwave and radio frequency communication devices, such as transmitters and receivers, mode selection switch, antenna switch, etc. Rf mems are such systems which interact with rf signal. For example, the addition of a top electrode, above the membrane, to pull the membrane up 4,5.
Design, fabrication and characterisation of rfmems is the property of its rightful owner. This page describes rf mems basics with applications and rf mems switch manufacturers. Rf mems mems devices capable of reconfiguring the rf characteristics of a device. Download ppt on micro electro mechanical system mems. A radiofrequency microelectromechanical system rfmems is a microelectromechanical system with electronic components comprising moving submillimetersized parts that provide radiofrequency rf functionality. Pa design methodology and fabrication the power amplifier is a single stage and uses a cree 40006p 6 watt gan hemt 9. May 27, 2014 this paper presents a new type of capacitive shunt rf mems switch. Yufeng jin a, jinwen zhang a, weibin zheng b, yilong hao. Rf mems switch technology is promising to enable the development of such structures. High added value applications for rf mems switchesvaricaps the use of mems switches in highend markets depend on 5 key parameters. The modifications mainly affect the switch membrane, which is made more robust, and the stopping pillar. By far the most important rf mems component is the switch.
Use of silicon and polymers in the manufacture of mems are studied. An rf mems switch is used in the output to select shorted stubs for tuning. If you continue browsing the site, you agree to the use of cookies on this website. Threedimensional rf mems switch for power applications. Ohmiccontact switch with cantilever beam and electrostatic actuation what is ge digitalmicro switch technology. As an example of rf devices, a capacitive mems switch for millimeterwave has been proposed. If so, share your ppt presentation slides online with. These devices can switch at rf frequencies and tend to have high isolation, i.
Comparision of mems switches with solid state switches 9. An rf mems switch is a specific type of memsbased device that can provide switch. Each sensor type has its own technical challenges related to integration and reliability in a given application. Not to be copied, distributed, or reproduced without prior approval. In the proposed design, float metal concept has been utilized to make the asymmetric structure on either side of the transmission line to implement the switch. Finite element method fem tools are very helpful to design and simulate the rf mems switch. The switch closing time depends on the actuation voltage and the opening time depends on the mechanical properties of the switch. The pressure and the velocity field are the solution of the navierstokes equations.
Pdf this paper emphasis on stateoftheart of the earlier until the current trend and. The goal of the rf mems is to extend the device bene. Mems switch pdf a novel capacitive rf mems switch with. Rfmems switch design optimization for longterm reliability. Terms rf mems, switching speed, tunable filter, phase shifter. Rf mems for wireless communications imems01 short course attaining highq problem. Mems are made up of components between 10 to 100 micrometers in size i. Rf mems basics this chapter provides the basic introduction to rf mems switches.
This rf mems switch is designed and simulated using finite element method fem tool. These switches are the unambiguous micro mechanical switches that are intended to operate at rf to mm wave frequencies, which mean 0. Also, there is no risk of selfactuation due to excess signal rf power. Rfmems switches for reconfigurable integrated circuits. Mar 22, 2018 the switch closing time depends on the actuation voltage and the opening time depends on the mechanical properties of the switch. Chapter 2 working principles of mems and microsystems. Ibm research laboratory develops diaphragmtype silicon micro machined pressure sensors. Show director provides 5 way navigation and the option to highlighting important parts of a presentation. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. The prior art includes an rf mems frequency tunable fractal antenna for the 0. The structure of the switch consists of a cpw coplanar waveguides transmission lines and a suspended membrane. This template is a set of electric symbols for powerpoint used for schematic diagrams. An rf mems switch utilizes mechanical movement of switch beam to achieve a short or an open circuit in. Aug 11, 2015 in this brief a new low actuation voltage rf mems switch is presented which can be integrated and controlled with available cmos technologies.
Electric circuit symbols element set for powerpoint present a simple yet legible schematic diagram in high resolution powerpoint template. The fabrication of rf mems shunt capacitive switches and mems tunable. Rf mems switches, and at the same time, an assess ment of their potential applications in defense and commercial systems. There are various types of quintessential rf mems components, such as rf mems resonators and oscillators. Rf functionality can be implemented using a variety of rf technologies. Besides rf mems technology, iiiv compound semiconductor gaas, gan, inp, insb, ferrite, ferroelectric. Over the last decade, a large number of papers have been published on the development of rf mems devices mainly focusing on the rf mems. Through electromagnetic analysis, this research demonstrates the feasibility of using rf mems switches to. Rf mems basics rf mems switch manufacturers vendors. The design of a rf mems switch plays an important role. Although many rf mems switches shows impressive results in insertion loss and isolation, lifetime and power handling limit some of the applications and implementations of mems switches.
Radio frequency microelectromechanical systems rf mems. Rfmems are expected to provide multiband and low power consumption and downsizing. Rf mems components switches and relays open circuits, close circuits, or connect signals to ground includes rf signal electrodes and actuating electrodes if the actuating signal and the rf signal exist on the same pair of electrodes, its a switch if the actuating signal and the rf signal exist on different. Emems switches capacitive shunt switches dccontact shunt switches dccontact series switches 3162005 eel6935 advanced mems spring 2005 instructor. Rf mems are novel components which exhibit this potential 1. Ultra low actuation voltage rf mems switch micro and nano. Rf mems microelectromechanical systems are rf components and devices, which exhibit mechanically movable parts and thus enable a change of topology. Microelectromechanical systems mems are micronsize devices that can sense or manipulate the physical world. Jun 15, 2015 rf mems component ohmic switch g voltage 40 to 120 v depends on desig operate up to 60ghz operated under 200 n at 10 ghz. Worlds best powerpoint templates crystalgraphics offers more powerpoint templates than anyone else in the world, with over 4 million to choose from.
560 206 1371 1217 534 1120 853 1373 709 684 1211 545 1559 230 113 19 87 992 247 1122 1399 272 309 46 858 606 730 868 26 400 1225 1481 73 748 499 658 626 1425 1025 877 1243 1189 1259 1051 1455 1028